Highly Dynamic 4DOF Piezo Wafer Stage for Inspection and Metrology, new from PI
Leveraging decades of piezo nanopositioning technology experience, introducing at 2024 Semicon West
Auburn, MA - PI's newest wafer inspection solution is based on a hybrid kinematics design, combining Piezo-Walk motors and piezo stacks to achieve both long travel and highly dynamic, ultra-precise motion. This integrated 4-DOF solution reduces equipment complexity, integration efforts, costs, and risks.
Piezo-Walk motors are self-locking at rest, adding no servo dither and heat, unlike other motion techniques. The high bandwidth of the short-travel piezo stack actuators allows for dynamic tracking and error compensation of external disturbances (e.g., from long travel XY wafer stages).
The 4DOF module can also correct for rotational wafer misalignment and takes wafer thickness and machine static characteristics into account.
The high-stiffness design of the Tip-Tilt drive module provides extremely fast step and settle (<10msec) and position stability (<0.05µrad).
More information on Piezo Stage for Wafer Inspection & Metrology
PI's advanced design expertise and long experience as a supplier to top tier semiconductor manufacturers and leading system integrators enables us to understand and meet the high demands of the industry, including copy exactly and meeting strict cleanroom requirements.
Industries Served
Semiconductors, Metrology, Optics, Photonics
Featured Product
T.J. Davies' Retention Knobs
Our retention knobs are manufactured above international standards or to machine builder specifications. Retention knobs are manufactured utilizing AMS-6274/AISI-8620 alloy steel drawn in the United States. Threads are single-pointed on our lathes while manufacturing all other retention knob features to ensure high concentricity. Our process ensures that our threads are balanced (lead in/lead out at 180 degrees.) Each retention knob is carburized (hardened) to 58-62HRC, and case depth is .020-.030. Core hardness 40HRC. Each retention knob is coated utilizing a hot black oxide coating to military specifications. Our retention knobs are 100% covered in black oxide to prevent rust. All retention knob surfaces (not just mating surfaces) have a precision finish of 32 RMA micro or better: ISO grade 6N. Each retention knob is magnetic particle tested and tested at 2.5 times the pulling force of the drawbar. Certifications are maintained for each step in the manufacturing process for traceability.
