Wafer Stages for Thin Film Metrology and Glass Substrate Inspection

Configurable, granite-based wafer-stage sub-system, new from PI.

Auburn, MA - PI, a global leader in nanopositioning and motion control, is offering granite-based multi-axis precision motion systems for the automation of wafer metrology, glass substrate inspection and lithography applications. These highly accurate stages are based on modular concepts that allow fast customizations. Several technologies are available including air bearings, rails-on-granite, and several types of piezo drive systems. Large travel ranges of one meter and more can be achieved with a variety of different configurations. The XYZ-Theta example stage shown is designed for thin film metrology equipped with direct drive motors, nanometer resolution encoders, and high-performance ACS motion controllers.


PI's advanced design expertise and long experience as a supplier to top tier semiconductor manufacturers and leading system integrators enables us to understand and meet the high demands of the industry, including copy exactly and meeting strict cleanroom requirements.

Industries Served
Semiconductors, photonics, optics, automation, metrology

Featured Product

T.J. Davies' Retention Knobs

T.J. Davies' Retention Knobs

Our retention knobs are manufactured above international standards or to machine builder specifications. Retention knobs are manufactured utilizing AMS-6274/AISI-8620 alloy steel drawn in the United States. Threads are single-pointed on our lathes while manufacturing all other retention knob features to ensure high concentricity. Our process ensures that our threads are balanced (lead in/lead out at 180 degrees.) Each retention knob is carburized (hardened) to 58-62HRC, and case depth is .020-.030. Core hardness 40HRC. Each retention knob is coated utilizing a hot black oxide coating to military specifications. Our retention knobs are 100% covered in black oxide to prevent rust. All retention knob surfaces (not just mating surfaces) have a precision finish of 32 RMA micro or better: ISO grade 6N. Each retention knob is magnetic particle tested and tested at 2.5 times the pulling force of the drawbar. Certifications are maintained for each step in the manufacturing process for traceability.