Precision industrial motion systems are used in test, assembly or laser micro-machining of high precision and high value components and in electronics, optics, and photonics manufacturing, to name a few.
Superior positioning and geometric performance, absolute high-resolution encoders, and a large, ⌀260mm clear aperture makes this air bearing stage a precision instrument for optical alignment, metrology, inspection, calibration, and scanning. Features and advantages include ⌀260mm clear aperture, 77kg load capacity, 0.0015µrad resolution (max.), 500 RPM (max.), flatness/eccentricity of <175/300nm, wobble of < 1 µrad, and direct drive motor. Air-bearings have no rolling or sliding elements and deliver frictionless, non-contact motion, resulting in negligible reversal error, better flatness, and minimal wobble and eccentricity. All these are ideal prerequisites for applications such as inspection and metrology, calibration, and scanning of high-end parts (i.e., infrared and precision optics, turbine blades, shafts and bearings) in industries like aerospace, aircraft, automotive, semiconductors, and photonics.