Highly Dynamic XY Linear Motor Scanning Stage, Introduced by PI
The L-731 magnetic linear drive ensures high velocity and acceleration.
Motion and precision positioning systems expert PI (Physik Instrumente) L.P. introduces a new compact metrology XY stage - the L-731. The magnetic linear direct drive ensures high velocity and acceleration, ideal for inspection and microscopy.
With a travel range of 205mm square and solid velocity to 100mm/sec, the L-731 delivers high accuracy and smooth motion. Precision crossed roller bearings with anti-creep cage assist guarantee superior guiding accuracy (1.5µm straightness for loads up to 20kg).
An integrated optical reference encoder and limit switch provide further positioning control and accuracy for this compact stage with 5nm resolution. DC servo motor versions are available on request.
Standard and Custom
PI has in-house engineered solutions with over 4 decades of experience working with customers to provide products that meet application demands, and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the application.
Applications of the L-731
Fields of applications include automation, semiconductor applications, photonics, bio-nano-technology, metrology, microscopy, micro-manipulation, including cleanroom applications.
Features & Advantages
Travel Range 205mm x 205mm (8")
Sensor Resolution 5nm
Velocity to 100mm/s
Load Capacity to 20kg
Integrated Direct Drive Linear Motors and Linear Encoders
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