New Balluff Wafer Mapping Sensor Delivers Precision in the Smallest Spaces

Balluff features the smallest LED sensor on the market

Balluff's new wafer mapping sensor, BOH00EZ, utilizes a highly precise photoelectric sensor for quick and reliable detection of semiconductor wafers and slotting errors in FOUPS - front opening unified pods. Especially designed for use with extremely thin end effectors, it features an extremely controlled and focused light spot, allowing it to detect wafers even just a few μm thick with extreme precision.


Based on photoelectric Micromote technology, it features the smallest LED sensor on the market in an impressively small sensor head - measuring in at just 2.4 x 1.5 x 7 mm. This allows it to deliver precision in even the smallest spaces.

In addition to wafer mapping, this sensor delivers capabilities that can be used for a variety of applications that require through beam sensors in a small area, such as Life Science and Food and Beverage applications.

Key features:

Multi-functional sensor head
Smallest LED sensor on the market
Very compact, extremely flexible sensor cable
Flexible adaptation to the respective application using an external amplifier
Learn more at: http://www.balluff.com

About Balluff Inc.
Balluff Inc. is the U.S. subsidiary of Balluff GmbH, Neuhausen, Germany. Balluff is a leading supplier of networked IO-Link control system architectures that unlock the potential of the IIoT and Industry 4.0. Balluff offers a wide range of intelligent IO-Link and industrial Ethernet sensors in a variety of technologies including inductive, photoelectric, capacitive, and magnetic as well as magnetostrictive linear position sensors, magnetic tape linear encoders, industrial RFID systems, and industrial vision systems. Balluff provides cost-saving, process-enhancing solutions to machine builders and manufacturers to control, regulate, automate, assemble, position, and monitor manufacturing, assembly, and packaging sequences. Industries served include: automotive, packaging, food processing, beverages, tire, primary metals, conventional and alternative energy, semiconductor, plastics, and fluid power.

Featured Product

OnLogic Karbon 430 Fanless Rugged Computer The K430

OnLogic Karbon 430 Fanless Rugged Computer The K430

OnLogic Karbon 430 Fanless Rugged Computer The K430 packs the power and advanced IoT capabilities of modern Intel processing into a low profile, highly customizable, rugged fanless system built for the challenges of the IoT Edge. Internal components are protected from dust, debris, chemicals, and moisture thanks to fanless and ventless cooling. The Karbon 430 features an operating temperature range of -40° to 70°C, 9~48 V power input, and zero moving parts, all of which help to ensure a long system lifespan.