Large aperture Direct Drive Air bearing Rotary tables
This rotary table combines axial brushless RotoLinear motoring modules and planar air bearings integrated into compact, direct drive configuration and provides unlimited rotation with precise positioning and velocity controls.
Newly released rotary table model RR-18-14 from the ROTORING direct drive rotary table Series provides enhanced angular positioning and is designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives.
This rotary table combines axial brushless RotoLinear motoring modules and planar air bearings integrated into compact, direct drive configuration and provides unlimited rotation with precise positioning and velocity controls.
ROTORING model RR-18-14 features center clear open aperture of 350 mm, total height 55 mm and delivers resolution of 1 arc-sec with torque of 32 Nm.
When processing 300 mm semiconductor wafers, every area of the wafer can be accessed from both sides.
In general automation applications large open center offers the opportunity to access parts from inside and outside of the table simultaneously. This feature allows robotic devices, pick and place and ancillary tooling to be mounted inside the table, saving floor space and reducing parts handling with increased productivity.
ROTORING rotary tables can be driven in open loop using microstepping drives or in closed loop fashion, as a servo motor, with digital servo controllers.
Integrated multi-axes solutions - combination of the XY tables and XYZ systems are available.
Typical applications include semiconductor assembly equipment, wafer inspection and cutting, optical applications, precision part indexing and robotics.
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