Affordable Nanometer-Precision Linear Stage Based on PiezoWalk Linear Motor

An ultra-precise motor in a compact, flat stage design facilitates mechanical integration of the new N-565 linear positioner.

PI's new N-565 compact, nanometer-precision linear stages are designed for high-end applications in bio-nanotechnology, fiber-optics, microscopy, semiconductor testing, and metrology and scientific research in beamlines and laser labs.

Compact, Affordable and Nanometer Precision
Due to the fully integrated linear piezo motor, the low-profile stages have a very small footprint with a width of only 65mm and length from 80mm. Travel ranges 1/2", 1" and 2" are offered in 13, 26 or 52 mm.
Interferometric PIOne Linear Encoder provides Sub-Nanometer Resolution
An integrated interferometric linear encoder developed by PI can resolve to 20 pm and allows incremental motion below one nanometer. Due to the short signal period of 0.5μm, the linearity error of PIOne encoders is less than 1%.
PiezoWalk® Technology: Self-Clamping, High Resolution, Force, and Low Wear
The PiezoWalk® technology combines the technological advantages of piezo class resolution with long travel ranges: they offer subnanometer resolution, high forces, and high stiffness. In contrast to conventional long-travel piezo-motor principles, PiezoWalk® stepping drives are not subject to sliding friction effects and virtually wear free motion is achieved, because the "legs" lift off for each step. Preloading the actuators against the runner ensures a self-clamping force even when powered down and the piezo stepping drive holds a position mechanically stable without servo jitter and energy consumption. PiezoWalk® motors were developed for the semiconductor industry over a decade ago and provide extreme reliability.

Crossed Roller Bearings Provide Straight and Flat Motion
With crossed roller bearings, the point contact in ball bearings is replaced by a line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller bearings are also distinguished by high guiding accuracy and load capacity. Roller creep is prevented by active cage assist.
Valid Patents

PIs PiezoWalk stepping drive technology is protected by the following patents and patent applications: US6800984B2, EP1267478B1, EP2209202B1, EP2209203B1, DE4408618B4, DE10148267B4

Extensive Software Support, Controller with Low Operating Voltage
The PiezoWalk drive is designed to run on a maximum voltage of 45V. Several controller options are available: stand alone, OEM card, rack mount, and multi-axis controllers with coordinate transformation for parallel-kinematics applications. For start-up and system configuration, the PIMikroMove GUI is included, as well as LabView drivers and DLLs.

Specifications, Datasheets, More Information >
Features & Advantages
Ultra-High Precision Design: 0.5nm Encoder Resolution
Patented PiezoWalk® technology combines piezo-class resolution with long travel and extreme reliability
Self-Locking at power off. No drift, no heat generation at position hold
3 Travel Ranges: ½", 1" and 2"
Compact Design: 65mm Width, 20mm Height
Standard and Custom
PI has in-house engineered solutions with over 4 decades of experience working with customers to provide products that meet application demands, and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the application.
USA / Canada | info(at)pi-usa(dot)us
(508) 832-3456
(508) 832-3456
(949) 679-9191 (LA Area & Mexico)
(408) 533-0973 (Silicon Valley/Bay Area)

About PI
PI is a leading manufacturer of piezo ceramic components, precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with twelve subsidiaries, R&D / engineering on 3 continents and total staff of 850+.

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